Õâ¿î·ÉÃ뼤¹âֱд¹â¿Ìϵͳ,laser lithography systemÊÇרҵΪ΢Äɽṹ¹âÊ´¿Ì¶øÉè¼ÆµÄ¼¤¹âֱд¹â¿Ì»ú¡£·ÉÃ뼤¹âֱд¹â¿Ìϵͳ»ùÓÚ¶à¹â×Ӿۺϼ¼Êõ£¨multi photon polymerization, mPP),ÊʺÏÊг¡Éϵĸ÷ÖÖ¹â¿Ì½º£¨photoresists£©£¬Äܹ»ÒÔÄÉÃ×¾«¶ÈºÍ·Ö±æÂÊ΢Äɼӹ¤¸÷ÖÖÈýά½á¹¹,ÊÇÈ«ÇòÁìÏȵļ¤¹â¹â¿Ì»ú.
·ÉÃ뼤¹âֱд¹â¿Ìϵͳ
¼¤¹â¹â¿Ì»ú3DÄ£ÐÍÖƱ¸
ֱд¹â¿Ì»úÖ±½Ó¼¤¹â¿Ì»®
¼¤¹â¹â¿Ì»úÕûÌ×ϵͳµ½»õ¼´¿ÉʹÓÃ
¼¤¹â¹â¿Ì»úÌṩ100nm-10umµÄ·Ö±æÂÊ
ֱд¹â¿Ì»ú³¬Ð¡³ß´ç
¸ü¶à¼¤¹âֱд¹â¿Ì»úÇëä¯ÀÀ¹ÙÍø£ºhttp://www.felles.cn/guangkeji.html
¼¤¹â¹â¿Ì»ú3DÄ£Ð͵ÄÖƱ¸
ÕâÌ×Èýά¹â¿Ì»úÓɼ¤¹â΢¼Ó¹¤ÏµÍ³Èí¼þ¿ØÖÆ£¬¼òµ¥µÄ3DÄ£ÐÍͨ¹ýÕâÖÖÈí¼þ¼´¿ÉÉú³É£¬¶ÔÓڱȽϸ´ÔÓµÄ3DÄ£ÐÍ£¬Óû§¿ÉÒÔͨ¹ýAutodesk, AutoCADµÈÈí¼þÖÆ×÷£¬È»ºóµ¼Èëµ½Èýά¹â¿Ì»úµÄÈí¼þÖУ¬Õâ¸öÈí¼þÖ§³Ö.stl, dxfµÈ¸ñʽµÄÎļþÓÃÓÚ3D½á¹¹µÄÖÆÔì¡£
¼¤¹â¹â¿Ì»ú¼¤¹âÖ±½Ó¶Áд
ÕâÌ×¼¤¹â¹â¿Ì»úÓÉ·ÉÃ뼤¹â¹âÔ´£¬¾«ÃܵÄ3Öᶨλ̨ºÍɨÃè¾µ×é³É¡£Ê×ÏÈ£¬´ý¿Ì¼µÄͼÐÎͨ¹ý¼¤¹â¹â¿Ì»ú¾«Ãܵļ¤¹â¾Û½¹ÏµÍ³Ö±½Ó´ÓCADÉè¼ÆÖе¼Èëµ½¹â¿Ì½ºÉÏ¡£¾ÛºÏÎïµÄË«¹â×Ó»ò¶à¹â×ÓÎüÊÕÓÃÓÚÐγɸßÖÊÁ¿±íÃæµÄ3D½á¹¹¡£<100nmµÄ³ß´ç¿É×ÔÐγɽṹ£¬200nm-10um³ß´çµÄ½á¹¹¿ÉÒÔ¿ØÖƲ¢Öظ´£¬ÕâÌ×¼¤¹âÊ´¿Ì»úÌṩÄÉÃ׳߶ȷֱæÂʺͶԾۺÏÎïµÄ¹ã·ºÑ¡Ôñ£¬´Ó¶ø¿ÉÒÔÊʺÏ΢Äɹâѧ,΢Á÷Ìå,MEMS,¹¦ÄܱíÃæÖÆ×÷µÈ¸÷ÖÖÓ¦ÓÃ.
ÓëCADÉè¼ÆµÈͬµÄ3D½á¹¹Ðγɺó£¬Î´¹Ì»¯µÄ¹â¿Ì½ºÊ£ÓàÎïÓÉÓлúÈܼÁÏ´µô,ÕâÑùÖ»ÁôÏÂÊ´¿ÌµÄ΢Äɽṹ³ÊÏÖÔÚ»ù°åÉÏ¡£
¼¤¹â¹â¿Ì»úºóÐø¹¤Ðò£º
ÔÚËùÐèµÄ΢ÄɽṹÐγɺó£¬Ëü±»½þÈëµ½¼¸ÖÖ²»Í¬µÄÈܼÁÖУ¬ÒÔ³ýȥʴ¿Ì¹ý³ÌÖÐÁôϵÄҺ̬¾ÛºÏÎï¡£¼¤¹â¹â¿Ì»úÈ«²¿¹ý³Ì¶¼ÊÇ×Ô¶¯»¯µÄ£¬ÖØÒª²ÎÊý¿ÉÒÔ¸ù¾ÝÒªÇó¶øÉ趨£º½þÈëʱ¼ä,ζȵÈ.¶ÔÓÚÌØÊâµÄÑùÆ·»ò¼Ó¹¤¶ÔÏ󣬿ÉÒÔʹÓÃ×ÏÍâ¹â»ò¸ÉÔï»ú´¦Àí¡£
·ÉÃ뼤¹âֱд¹â¿Ìϵͳ
Ó¦ÓÃ
• Nanophotonic devices (3D photonic crystals)¼¤¹â¹â¿Ì»úÓÃÓÚÄÉÃ×¹â×ÓÆ÷¼þ£¨Èýά¹â×Ó¾§Ì壩
• Microfluidics Èýά¹â¿Ì»úÓÃÓÚ΢Á÷¿ØоƬ
• Microoptics (lenses, structures on an optical fiber tip, etc.)Èýά¹â¿Ì»úÓÃÓÚ΢¹âѧ£¨¹âѧ¶ËÃæ΢½á¹¹ÖÆ×÷£©
• Micromechanics ¼¤¹â¹â¿Ì»úÖÆ×÷»ú΢»úе
• Micro-Opto-Electromechanical Systems (MOEMS) ¼¤¹âÊ´¿Ì»úÖÆ×÷΢Ð͹â»úµçϵͳ
• Biomedicine ¼¤¹â¹â¿Ì»ú,Èýά¹â¿Ì»úÓÃÓÚÉúÎïҽѧ |